Axcelis Technologies, Inc. announced follow on shipments in the third and fourth quarters of the Company's Purion H200 SiC Power Series™ high current implanters to a leading power device chipmaker. The shipments went to multiple fabs located in Asia and Europe. In the fourth quarter Axcelis also successfully closed a Purion XE Power Series SiC high energy implanter evaluation for a new customer penetration in Europe.

The systems at both customers will be used in high volume production of SiC power devices supporting automotive device markets.