Axcelis Technologies, Inc. Announces Multiple Orders for 'Purion H' from Memory Chipmakers in Asia Pacific
January 30, 2017 at 06:30 pm IST
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Axcelis Technologies, Inc. announced that it has received orders for the Purion H™ high current implanter from two manufacturers of memory devices in the Asia Pacific region. One of the orders is a follow-on order and the second order is a new customer placement. The systems will be used to support capacity ramps for next generation memory products. The systems will ship in the first quarter. The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, Axcelis has built the complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ and Purion VXE™ high energy implanters.
Axcelis Technologies, Inc. designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The Company offers a complete line of high energy, high current and medium current implanters for all application requirements. In addition to equipment, the Company provides extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. Its Purion flagship systems are all based on a common platform, which enables a combination of implant purity, precision and productivity. Combining a single wafer end station, with advanced spot beam architectures (that ensures all points across the wafer see the same beam condition at the same beam angle), Purion products enable process control to optimize device performance and yield, at high productivity. The Company sells its products to semiconductor chip manufacturers around the world.