PRESS RELEASE

Purchase of Property at Garching Production Site

Garching, January 23, 2013- SÜSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, announces the acquisition of the previously rented real estate at the main production site in Garching. The purchase agreement was signed on January 23, 2013, the transition of the title to the property is expected to take place on September 30, 2013. The property is sold by the Fabrilis Grundstücks-Vermietungsgesellschaft mbH & Co. Objekt Garching KG and Süss Grundstücksverwaltungsgemeinschaft Zeppelinstraße GbR. The purchase price of the 20,000 sqm land and the buildings amounts to EUR 8.7 million and will be financed out of available liquid funds. The purchase of the property is expected to generate a positive annual EBIT effect of EUR 0.4 million.

'Besides the rent savings, we gain a great deal of operational flexibility with regards to our company specific property requirements and make a statement on the importance of our production site in Garching.' said Frank P. Averdung, President and CEO of SÜSS MicroTec. 'This property offers interesting perspectives to enlarge our facilities in the future and its traffic connections as well as the proximity to research campuses in Munich are very attractive.'

About SÜSS MicroTec
SÜSS MicroTec, listed on TecDAX of Deutsche Boerse AG, is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SÜSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SÜSS MicroTec supports more than 8.000 installed systems worldwide. SÜSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit http://www.suss.com



Contact:
SÜSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: franka.schielke@suss.com

End of Media Release

Issuer: SÜSS MicroTec AG

Key word(s): Enterprise

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