Item 5.02. Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

(b) Effective as of January 18, 2022, Mr. Kevin Heidrich, Senior Vice President, Marketing and Corporate Development Leadership and a named executive officer of Onto Innovation Inc. (the "Company") accepted a modification of his reporting structure. As a result of this change, Mr. Heidrich will no longer be designated as an "executive officer" of the Company, as such term is defined in Rule 3b-7 under the Securities and Exchange Act of 1934, as amended (the "Exchange Act"), or as an "officer" of the Company for the purposes of Section 16 of the Exchange Act. Mr. Heidrich will continue his employment with the Company.





Exhibit No.   Description of Exhibit

              Cover Page Interactive Data File (embedded within the Inline XBRL
104           document)

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