The Hitachi NP6800 is a SEM-based dedicated probing system designed to meet the analytical needs of the 10-nm design node semiconductor device and beyond.
The precision piezoelectric-driven actuator is equipped with X, Y and Z axes probe movements allowing the probes to be controlled very precisely for measuring the electrical characteristics of a single MOS transistor.
The design concept was to create an easy-to-use probing system (like an optical probing system) while maintaining this same ease of operation even under the vacuum environment through our intuitive probe operation design.

Hitachi High-Technologies Corporation published this content on 31 December 2016 and is solely responsible for the information contained herein.
Distributed by Public, unedited and unaltered, on 27 January 2017 07:09:05 UTC.

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