ADEKA : Photoacid Generator Production Facility for EUV Resists to Begin Operations at Chiba Plant, Japan in August, Production capacity will be more than doubled

May 25, 2023

ADEKA CORPORATION

ADEKA's Photoacid Generator Production Facility for EUV Resists to Begin Operations at Chiba Plant, Japan in August, Production capacity will be more than doubled

ADEKA CORPORATION (President and Chief Executive Officer: Hidetaka Shirozume) completed construction of a production facility for photoacid generators for extreme ultraviolet (EUV) photoresists, which had been under construction at its Chiba Plant, Japan. Due to the increasing demand for advanced materials from our customers, the plant is scheduled to begin operation in August 2023.

Semiconductors are becoming more highly integrated through miniaturization, as faster information processing and lower power consumption are indispensable for realizing an advanced ICT society, such as 5G communications and the use of AI. In particular, Logic IC are undergoing rapid miniaturization, and there is a growing need for new semiconductor materials that match this trend.

We have been expanding its information and Electronics and IT Materials Business by providing advanced materials essential for the miniaturization of semiconductors.

In products for logic IC, sales of photoacid generators for photoresists used in advanced lithography processes, named the ADEKA ARKLS series are growing. Because this products world-class quality that are the culmination of our strengths in Optical characteristic control and High purification technologies. In August 2021, we decided to increase production capacity in anticipation of increased demand for photoresists for EUV lithography, and construction was underway.

The completed production facility will have more than twice the production capacity.

In terms of equipment, we will strengthen quality control capabilities by introducing state-of-the-art equipment and new process technology, and achieve low metal management of

1 ppb or less.

ADEKA Group aims to become the world-class semiconductor materials company not only by maintaining its global share of DRAM and NAND materials, but also by expanding its business into Logic IC.

• Completed production facility (ADEKA CORP. Chiba Plant)

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■ Outline

Location	Chiba Planrt : Sodegaura-shi, Chiba pref., JAPAN
Investment value	About 2.7 billion yen
Total floor area	1,698 m2 * Newly established from the current 280 m2
Production capacity	At least twice the conventional capacity
Schedule	Operation in Augast 2023

Supplementary notes:

1: About ADEKA ARKLS series, photoacid generator

ADEKA ARKLS series are the initiator for photoresists. The product is used to generate acids through reaction to specific light and electron rays to realize fine patterning in the semiconductor lithography process.

The use of cutting-edge lithography: A further increase in sales can be expected as an indispensable product for photoresists used for lithographic exposure with argon fluoride (ArF) and extreme ultraviolet (EUV).

2: Adout ADEKA's Electronics and IT Materials Business

We provide many advanced products indispensable for the development of an advanced ICT society in the semiconductor and display fields, and high dielectric materials for advanced semiconductor memory, named ADEKA ORCERA series has the global No. 1 market share.*1 In the ADX 2023 (FY 2021-2023), ADEKA Group's MTMP, the planned capital investment in the business was 9.5 billion yen (three-years total)*2. As a result of aggressive investment mainly in advanced semiconductor materials, the investment amount at the end of fiscal 2022 was approximately 120% of the original plan (including approved base).

*1 Fuji Chimera Research Institute, Inc. 2020 Semiconductor Materials Market Status and Future Outlook. *2 The target capital investment for the entire ADEKA Group is 50 billion yen/three-yearstotal, including

environmental investment to achieve carbon neutrality.

• Contacts
  ADEKA CORPORATION
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