Entegris : Entegris Launches New Photochemical Dispense System; IntelliGen(R) Mini Earns Positive Customer Evaluations - Product Shipments Underway
July 10, 2006 at 05:30 pm IST
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Entegris, Inc. (Nasdaq:ENTG) announced today it is
introducing its new IntelliGen(R) Mini photochemical dispense system
at the semiconductor global trade show SEMICON West in San Francisco
next week. The IntelliGen(R) Mini dispense system delivers highly
accurate point-of-use photochemical dispense across a wide range of
conditions. Product shipments began earlier this year.
Advanced photochemicals used in dispense and coating processes at
the 193 nanometer (nm) level and below are very sensitive to gas
microcontamination, pressure and vacuum shock. In response, Entegris
designed this patented, two-stage technology that provides maximum
contamination control, while reducing pressure and vacuum shock. It
also enables filtration to occur at a rate independent of the
dispense. This allows the use of 10 nanometer and lower pore sizes,
enabling maximum defect reduction and higher yields. The IntelliGen(R)
Mini dispense system prevents micro bubble formation in even the most
sensitive photochemicals, and its 50-percent size reduction from
earlier dispense system models makes it ideal for both new track
installations and existing pump retrofits.
"The IntelliGen Mini's unique two-stage technology and compact
size are a leap forward in dispense control, and the response by some
of the top OEMs and IDMs using it in the first three months of
introduction of this advanced technology has been great," said Todd
Edlund, vice president and general manager of liquid systems for
Entegris. "Based on these first results, we're excited that this new
product will be an attractive and effective solution for both new
tools, and the retrofit of existing tools in the fab."
ABOUT ENTEGRIS
Entegris (merged with Mykrolis in August 2005) is the global
leader in materials integrity management - delivering a wide range of
products for purifying, protecting and transporting critical materials
used in processing and manufacturing in semiconductor and other high
tech industries. Entegris is ISO 9001 certified and has manufacturing,
customer service or research facilities in the United States, China,
France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan.
Additional information can be found at www.entegris.com.
Entegris, Inc. is a supplier of advanced materials and process solutions for the semiconductor and other high technology industries (high-tech). The Company's segments include Materials Solutions (MS), Microcontamination Control (MC) and Advanced Materials Handling (AMH). The MS segment provides advanced consumable materials, such as chemical mechanical planarization (CMP) slurries and pads, deposition materials, process chemistries and gases, formulated cleans, etchants and other specialty materials. The MC segment is engaged in filtering and purifying critical liquid chemistries and gases used in semiconductor manufacturing processes and other high-tech industries. The AMH segment protects critical materials during manufacturing, transportation, and storage; including products that monitor, protect, transport and deliver critical liquid chemistries, wafers, and other substrates for a broad set of applications in the semiconductor, life sciences and other high-tech industries.
ENTEGRIS, INC. 
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